Hyo Kyeom Kim, Il-Hyuk Yu, Jae Ho Lee, Tae Joo Park, and Cheol Seong Hwang
“Controlling work function and damaging effects of sputtered RuO2 gate electrodes by changing oxygen gas ratio during sputtering”
ACS Appl. Mater. Inter. 5(4), 1327−1332 (2013) - Feb. (IF=8.097)