HOME > Publication > Papers

 
작성일 : 12-09-11 11:34
Deok-Yong Cho, Hyung Suk Jung, Il-Hyuk Yu, Jung Ho Yoon, Hyo Kyeom Kim, Sang Young Lee, Sang Ho Jeon, Seungwu Han, Jeong Hwan Kim, Tae Joo Park, Byeong-Gyu Park, and Cheol Seong Hwang, "Stabilization of Tetragonal HfO2 under Low Active Oxygen Source Envir
 글쓴이 : 최고관리자
조회 : 1,672  
   articleASAP_cm3001199.pdf (2.1M) [42] DATE : 2012-09-11 11:34:03
Deok-Yong Cho, Hyung Suk Jung, Il-Hyuk Yu, Jung Ho Yoon, Hyo Kyeom Kim, Sang Young Lee, Sang Ho Jeon, Seungwu Han, Jeong Hwan Kim, Tae Joo Park, Byeong-Gyu Park, and Cheol Seong Hwang
 
"Stabilization of Tetragonal HfO2 under Low Active Oxygen Source Environment in Atomic Layer Deposition"
 
Chem. Mater. 24(18), 3534 (2012) - Sep.       (IF=9.890)