Hyung-Suk Jung, Sang-Ho Jean, Hyo Kyeom Kim, Il-Hyuk Yu, Sang Young Lee, Joohwi Lee, Yoon Jang Chung, Nae-In Lee, Tae Joo Park, Jung-Hae Choi, and Cheol Seong Hwang, “The impact of carbon concentration on the crystalline phase and dielectric constant of
Hyung-Suk Jung, Sang-Ho Jean, Hyo Kyeom Kim, Il-Hyuk Yu, Sang Young Lee, Joohwi Lee, Yoon Jang Chung, Nae-In Lee, Tae Joo Park, Jung-Hae Choi, and Cheol Seong Hwang,
“The impact of carbon concentration on the crystalline phase and dielectric constant of atomic layer deposited HfO2 films on Ge substrate”
ECS J. Solid State Sci. 1(2), N33-N37 (2012) - Jul. (IF=1.808)
작성일 : 12-07-29 10:11
조회 : 1,067
