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작성일 : 12-05-15 20:12
Keum Jee Chung, Tae Joo Park, Prasanna Sivasubramani, Jiyoung Kim and Jinho Ahn “Impact of ozone concentration on atomic layer deposited HfO2 on GaAs” Microelectron. Eng. 89, 80-83 (2012) - Jan. (IF=1.338)
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Impact of ozone concentration on atomic layer deposited HfO2 on GaAs.pdf (625.4K)
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DATE : 2012-05-22 20:27:14
Keum Jee Chung,
Tae Joo Park
, Prasanna Sivasubramani, Jiyoung Kim and Jinho Ahn
“Impact of ozone concentration on atomic layer deposited HfO2 on GaAs”
Microelectron. Eng. 89, 80-83 (2012) - Jan.
(IF=2.020)
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