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작성일 : 12-05-15 20:10
Bongki Lee, Tae Joo Park, Arabi Hande, Keum Jee Chung, Moon Jae Kim, Robert M. Wallace, Jiyoung Kim, Xinye Liu, Jaehyung Yi, Mike Rousseau, D. Shenai, and J. Suydam, “Electrical Properties of Atomic-layer-deposited La2O3 Films Using a Novel La Formamidi
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   Electrical properties of atomic-layer-deposited La2O3 films using a novel La formamidinate precursor and ozone.pdf (469.5K) [10] DATE : 2012-05-22 20:42:44
Bongki Lee, Tae Joo Park, Arabi Hande, Keum Jee Chung, Moon Jae Kim, Robert M. Wallace, Jiyoung Kim, Xinye Liu, Jaehyung Yi, Mike Rousseau, D. Shenai, and J. Suydam
 
“Electrical Properties of Atomic-layer-deposited La2O3 Films Using a Novel La Formamidinate Precursor And Ozone”
 
Microelectron. Eng., 86, 1658 (2009) - Jul.       (IF=2.020)