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작성일 : 12-05-15 20:09
Minha Seo, Yo-Sep Min, Seong Keun Kim, Tae Joo Park, Jeong Hwan Kim, Kwang Duk Na and Cheol Seong Hwang, "Atomic layer deposition of hafnium oxide from tertbutoxytris (ethylmethylamido) hafnium and ozone: rapid growth, high density and thermal stability",
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   Atomic layer deposition of hafnium oxide from tertbutoxytris(.pdf (768.0K) [22] DATE : 2012-05-22 20:50:43
Minha Seo, Yo-Sep Min, Seong Keun Kim, Tae Joo Park, Jeong Hwan Kim, Kwang Duk Na and Cheol Seong Hwang
 
"Atomic layer deposition of hafnium oxide from tertbutoxytris (ethylmethylamido) hafnium and ozone: rapid growth, high density and thermal stability"
 
J. Mater. Chem. 18, 4324–4331 (2008) - Aug.       (IF=3.515)