Minha Seo, Yo-Sep Min, Seong Keun Kim, Tae Joo Park, Jeong Hwan Kim, Kwang Duk Na and Cheol Seong Hwang
"Atomic layer deposition of hafnium oxide from tertbutoxytris (ethylmethylamido) hafnium and ozone: rapid growth, high density and thermal stability"
J. Mater. Chem. 18, 4324–4331 (2008) - Aug. (IF=3.515)