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작성일 : 24-06-27 10:13
Min-Ji Ha, Na-Gyeong Kang, Woo-Hee Kim, Tae Joo Park, Tae-Eon Park, Ji-Hoon Ahn* "Low-resistivity molybdenum-carbide thin films formed by thermal atomic layer deposition with pressure-assisted decomposition reaction" J. Vac. Sci. Technol. A 42, 042401
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Min-Ji Ha, Na-Gyeong Kang, Woo-Hee Kim, Tae Joo Park, Tae-Eon Park, Ji-Hoon Ahn*

"Low-resistivity molybdenum-carbide thin films formed by thermal atomic layer deposition with pressure-assisted decomposition reaction"

 J. Vac. Sci. Technol. A 42, 042401 (2024) *Corresponding author (IF=2.4)