Suk Woo Lee, Sug Hun Hong, Jaehoo Park, Moonju Cho, Tae Joo Park, Cheol Seong Hwang, Yun-Seok Kim, Ha Jin Lim, Jong-Ho Lee, and Jeong Yeon Won, "Fabrication of HfO2 Thin-Film Capacitors with a Polycrystalline Si Gate Electrode and a Low Interface Trap Den