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작성일 : 22-06-03 12:39
Youkyoung Oh, Hyo-Bae Kim, Seung-Won Lee, Min Ji Jeong, Tae Joo Park*, Ji-Hoon Ahn*, “Effects of Zr content and annealing on ferroelectricity of as-grown crystalline Hf1-xZrxO2 thin films using Hf[Cp(NMe2)3] and Zr[Cp(NMe2)3] precursors via atomic layer
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Youkyoung Oh, Hyo-Bae Kim, Seung-Won Lee, Min Ji Jeong, Tae Joo Park*, Ji-Hoon Ahn*, 

“Effects of Zr content and annealing on ferroelectricity of as-grown crystalline Hf1-xZrxO2 thin films using Hf[Cp(NMe2)3] and Zr[Cp(NMe2)3] precursors via atomic layer deposition" 

Ceram. Int., 48, 17, 25661-25665 (2022) - Sep. *Corresponding author (IF=4.527)