Yoo Jin Jo, Jeong Hyun Moon, Ogyun Seok, Wook Bahng, Tae Joo Park*, and Min-Woo Ha*
"Electrical Characteristics of SiO2/4H-SiC Metal-oxide-semiconductor Capacitors with Low-temperature Atomic Layer Deposited SiO2"
J. Semicond. Tech., 17(2), 265-270, (2017) - Apr *Corresponding author (IF=0.374)