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작성일 : 17-04-03 15:47
Jaeyoung Choi, Soyeong Joo, Tae Joo Park, and Woo-Byoung Kim* "Densification of ~5 nm-thick SiO2 layers by nitric acid oxidation"
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https://doi.org/10.1016/j.apsusc.2017.03.292
[705]
Jaeyoung Choi, Soyeong Joo,
Tae Joo Park
,
and Woo-Byoung Kim*
"Densification of ~5 nm-thick SiO2 layers by nitric acid oxidation"
Appl. Surf. Sci., 413, 92-98, (2017) - Apr
*Corresponding author
(IF=4.439)
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