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2차원 물질을 이용한 헤테로구조의....

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글쓴이 최고관리자 등록일 12-12-21 13:49
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    차세대 전자소자 개발을 위해 그래핀에 대한 집중적인 관심이 쏟아지고 있지만, 밴드갭이 없는 물질 특성은 높은 on/off 비를 얻기 어렵다. 이를 극복하기 위해 폭이 좁은 형태를 제작하거나[GTB2012110507] 이중층 그래핀을 형성하고[GTB2011100572], 또는 수직형 트랜지스터 및 배리스터[GTB2012050587]와 같은 소자 구조들이 개발되고 있다. 하지만 on/off 비 향상과 함께 심각한 전류 밀도의 저하를 피할 수 없다.

    미국 University of California 소속 Xiangfeng Duan 교수가 이끄는 연구진은 MoS2 및 그래핀을 조합하여 헤테로 구조의 수직형 트랜지스터를 개발하고, 논리 소자로의 가능성을 확인했다. 연구 결과는 2012년 12월 16일자 Nature Materials지에 “Vertically stacked multi-heterostructures of layered materials for logic transistors and complementary inverters”란 제목으로 게재됐다.

    연구진은 먼저 화학기상증착법(CVD; Chemical Vapor Deposition)을 통해 합성된 단일층 그래핀을 산화실리콘 기판 위에 전사(transfer)하고, 마스크 및 산소 플라즈마 식각 공정을 통해 폭 10um, 길이 50um의 라인 패턴을 형성했다. 그리고 기계적 박리법을 통해 MoS2 조각을 올리고, 마지막으로 Ti(50 nm)/Au(50 nm)로 구성된 상부 전극을 증착했다. 하부 전극으로는 그래핀, 채널 영역으로는 MoS2로 구성된 수직형 트랜지스터를 제작한 것이다. 그래핀은 정전기적 차폐 효과(electrostatic screening effect)가 약하기 때문에 실리콘 게이트에 인가된 전압은 그래핀을 통과하여 MoS2 에너지 밴드를 효과적으로 제어할 수 있다.


    그림 2(a)는 제작된 수직형 전계효과트랜지스터(VFETs; Vertical Field Effect Transistors) 소자의 광학 이미지를 보여주는 것으로, 원자힘현미경(AFM; Atomic Force Microscope)을 통해 측정된 MoS2 두께는 30 nm로 나타났다. 그리고 소자 절단면에 대해 고해상도 투과전자현미경 측정 결과, 각 층간 계면이 물리적으로 잘 형성됐음을 확인할 수 있었다.


    그림 3(a)는 제작된 수직형 트랜지스터 소자의 출력 특성을 보여주는 것으로, 드레인 전압과 전류 밀도 사이의 관계를 보여준다. 드레인 전압이 마이너스 영역에서 게이트 전압에 따른 전류 밀도 제어가 크게 나타남에 따라 통상적인 n 타입 특성의 MoS2 반도체 특성을 확인할 수 있었다. 게이트 전압에 따른 전류 밀도 변화를 살펴보면(그림 3b 참조), on/off 스위칭 비가 1500 이상임을 알 수 있다. 또한 최적화 과정을 통해 최대 전류 밀도는 드레인 전압이 -1.0V일 때 5000 A/cm2로 나타남에 따라 통상적인 그래핀 소자에 비해 크게 증가했음을 알 수 있다.

    연구진은 그래핀을 활용한 새로운 소자 구조를 제시하고, on/off 스위칭 비 및 전류 밀도를 동시에 향상시키는데 성공했다. 트랜지스터 소자의 고유한 시간 지연 현상은 전류에 반비례한다. 즉 높은 전류 밀도는 짧은 시간 지연 현상이 나타나기 때문에 고속 소자 구동이 가능하다. 또한 수직형 트랜지스터의 경우 다중층으로 p 타입, n 타입을 동시에 구현하고, 동시에 게이트를 통한 전하 제어가 가능함에 따라 차세대 고성능 수직형 논리회로를 구성함에 있어 새로운 가능성을 제시한 것으로 평가된다.

    그림 1. 수직 적층형 그래핀-MoS2-금속 구조의 전계효과 트랜지스터 (a) 소자 윤곽을 보여주는 3차원 모식도. (b) 상부 금속 전극, MoS2 반도체 채널, 그래핀 하부 전극으로 구성된 소자의 절단면 이미지.
    그림 2. 수직형 트랜지스터의 제작 및 구조 분석. (a) 수직형 트랜지스터 소자의 광학 이미지로 점선으로 표시된 그래핀 영역은 10 um 폭의 크기를 지님. (b) 절단면 투과전자현미경 이미지. (c) 각 층간 계면을 보여주는 고해상도 투과전자현미경 이미지로, 단일층 그래핀의 경우 확인이 어렵기 때문에 다중층 그래핀을 활용하여 측정을 진행함.
    그림 3. 상온에서 측정된 소자의 전기적 특성. (a) 수직형 트랜지스터의 출력 특성 및 (b) transfer 특성. (c,d) 수평형 소자의 비교 특성.

    [이 게시물은 최고관리자님에 의해 2013-04-04 22:12:03 Free Board에서 이동 됨]

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