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300mm 웨이퍼를 두께 4μm로 초박막화

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글쓴이 최고관리자 등록일 14-07-07 20:40
조회 2,943
    ~ DRAM에서 검증, 초소형 대규모 3차원 메모리 ~

    도쿄공업대학 이종기능집적연구센터는 디스코, 후지츠연구소, PEZY computing, WOW 얼라이언스와 공동으로 반도체 메모리(DRAM)이 탑재된 직경 300mm 실리콘 웨이퍼(기판)의 두께를 4μm까지 초박막화하는 기술을 개발하였다. 이 기술은 범프(bump)를 이용하지 않는 WOW 적층기술을 이용하여 실리콘 웨이퍼의 두께를 디바이스층보다 얇은 4μm까지 박막화하는 데 성공한 것이다.

    반도체 메모리 칩을 적층하여 상하 칩을 전기접속하면 적층 수에 비례한 메모리 용량을 얻을 수 있으며, 극단적으로 미세화하지 않더라도 용량 메모리를 얻을 수 있다. 상하배선의 길이는 범프 크기와 칩을 관통하는 접속공(TSV)의 길이(칩의 두께)로 정하며, 이 TSV 배선에서는 칩 두께의 한계가 약 50μm이며, 범프와 TSV를 합한 길이는 약 100μm가 된다. TSV 한 개당 데이터 전송속도를 적게 하고(저주파수), 대역폭을 높이면 소비전력이 낮아진다. 이것에 가장 큰 영향을 미치는 것이 TSV의 밀도와 길이다. 범프와 조합시킨 TSV는 TSV의 수가 범프 크기와 범프 피치로 결정되고 TSV 길이의 단축과 고밀도화의 장해가 된다.

    본 연구그룹은 웨이퍼를 박막화하여 적층하고, TSV로 직접 상하 칩을 접속 배선하는 범프레스(bumpless) TSV 배선을 개발하였다. 이 방법을 이용하면 범프가 불필요하게 되며, 박막화 프로세스의 한계까지 웨이퍼를 얇게 할 수 있다. FRAM과 MPU는 지금까지 7μm로 박막화하는데 성공하였다. 이번에 2기가비트 DRAM이 형성된 두께 775μm의 300mm 웨이퍼를 약 1/200의 두께 4μm가지 얇게 하는데 성공하였으며, 이와 같이 얇게 하더라도 DRAM 특성에 영향을 주지 않는다는 것을 밝혀내었다. 두께 4μm은 DRAM의 디바이스 층보다 얇아 가시광도 투광한다.

    이 박막화 기술을 이용하면 디바이스 층을 포함하더라도 10μm 이하가 되며, 이 두께가 TSV의 길이가 된다. 이것은 종래 범프를 이용한 TSV와 비교하여 길이가 약 1/10로 단축된다. TSV가 짧아지면, 이것에 비례하여 배선 저항과 전기용량이 각각 작아진다. 길이가 1/10이 되면 배선성능의 지표가 되는 배선저항과 전기용량의 곱은 1/100로 감소된다. 때문에 4기가비트, 8기가비트, 16기가비트와 같은 메모리 용량의 확대에 맞춰 4층, 8층, 16층 적층해도 박막화한 칩이라면 전기적인 과제가 해소된다.

    박막화 칩을 16층 하더라도 전체 두께는 200μm 이하가 되며, 만약 16기가비트 메모리를 적층한다면 소형이면서 256기가비트의 대규모 메모리를 실현할 수 있다. 이것을 겨우 4개 배치하는 것만으로 테라비트 메모리를 실현할 수 있다. 이와 같이 대규모 메모리 용량을 종래 방법으로 달성하려면 10nm, 7nm급의 미세화가 필요하다.

    박막화로 TSV를 짧고 작게 할 수 있다면 가공하기 쉬어 생산성이 대폭 향상된다. 동시에 범프의 제약이 없어지기 때문에 평방밀리미터당 1,000개에서 1만 개의 TSV를 형성할 수 있다. 이러한 TSV를 이용하면 저주파수라도 고대역이 가능해지며 기가비트 전송속도당 에너지 효율이 향상된다. 때문에 빅데이터용 서버 및 스마트폰을 비롯한 소형 휴대단말기의 소비전력이 대폭 삭감된다. 다중코어(many core) MPU와 조합시키면 테라바이트의 고대역을 실현할 수 있다.


    Comments (2)

    Bynoe 23-03-18 01:04
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